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电流体动力学离子源的回顾及其在聚焦离子束技术中的应用

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发表于 2018-10-18 08:59:21 | 显示全部楼层 |阅读模式
Review Article: Review of electrohydrodynamical ion sources and their applications to focused ion beam technology
评论文章:电流体动力学离子源的回顾及其在聚焦离子束技术中的应用
Journal of Vacuum Science & Technology B 36, 06J101 (2018);
https://doi.org/10.1116/1.5047150

Jacques Gierak1,a), Paul Mazarov2, Lars Bruchhaus2, Ralf Jede2, and Lothar Bischoff
Hide Affiliations
1Centre de Nanosciences et de Nanotechnologies (CNRS—Université Paris-Sud), Avenue de la Vauve, 91120 Palaiseau, France
2Raith GmbH, Konrad-Adenauer-Allee 8, 44263 Dortmund,   Germany
3Helmholtz-Zentrum Dresden-Rossendorf, Institute of Ion Beam Physics and Materials Research, Bautzner Landstrasse 400, 01328 Dresden, Germany
a)Electronic mail: jacques.gierak@c2n.upsaclay.fr

ABSTRACT
摘要

In this article, the authors review, compare, and discuss the characteristics and applicative potential of a variety of nongallium ion liquid metal ion sources they have developed and successfully applied to nanopatterning. These sources allow generating on-demand ion beams and are promising for extending focused ion beams applications. They detail the operating characteristics of such sources capable to emit metal projectiles ranging from atomic ions with different charge states to polyatomic ions and to large metal clusters having sizes up to a few nanometers. They highlight their interest and relevance to current nanoscience challenges in terms of ultimate patterning or bottom-up nanofabrication capabilities.


        在本文中,作者回顾、比较和讨论了他们已开发并成功应用于纳米图案的各种非金属离子液态金属离子源的特性和应用潜力。这些离子源可以产生基于需求的离子束,有望用于扩展聚焦离子束应用。它们详述了能够发射金属射弹的这些离子源的操作特性,所述金属射弹的范围从具有不同电荷状态的原子离子到多原子离子,以及具有高达几纳米尺寸的大金属簇。他们突出了他们对最终图案化或自下而上纳米加工能力方面的当前纳米科学挑战的兴趣和相关发展。

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