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借助阴影和再发射效应进行Ag纳米颗粒的物理气相沉积

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发表于 2018-8-31 13:00:31 | 显示全部楼层 |阅读模式
Physical vapor deposition of Ag nanoparticles through shadowing and re-emission effects
Journal of Vacuum Science & Technology B 36, 051802 (2018);
借助阴影和再发射效应进行Ag纳米颗粒的物理气相沉积
https://doi.org/10.1116/1.5026581

Caiqin Han1,2, Dexian Ye3, Yiping Zhao2, and Junxue Fu4,a)
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1Jiangsu Key Laboratory of Advanced Laser Materials and Devices, School of Physics and Electronic Engineering, Jiangsu Normal University, Xuzhou 221116, China
2Department of Physics and Astronomy, and Nanoscale Science and Engineering Center, University of Georgia, Athens, Georgia 30602
3Department of Physics, Virginia Commonwealth University, Richmond, Virginia 23284
4Department of Physics, Hong Kong Baptist University, Hong Kong 999077, China
a)Electronic mail:   phyjxfu@hkbu.edu.hk

ABSTRACT
摘要

The morphology evolution of Ag nanoparticles (NPs) deposited by glancing angle deposition (GLAD) in a wide range of nominal deposition thickness d at room temperature has been investigated systematically. Nonspherical Ag NPs are formed with d < 500 nm, while vertical Ag-nanorod-like nanostructures are produced when d > 500 nm. Based on three-dimensional Monte Carlo simulations, such a morphological change can be attributed to the high mobility and re-emission of Ag atoms as well as the shadowing effect during the GLAD growth.


        本文系统地研究了室温下在标称沉积厚度d的宽泛范围内通过掠射角沉积(GLAD)制备的Ag纳米颗粒(NPs)的形态演变。在d < 500 nm的情况下,形成非球形Ag NPs,而当d > 500 nm时则生成垂直的Ag-类纳米棒状的纳米结构。基于三维蒙特卡罗(Monte Carlo)模拟,这种形态变化可归因于Ag原子的高迁移率和再发射以及GLAD生长期间的阴影效应。


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