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圆片规模制造CMOS兼容的高纵横比封装纳米通道

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发表于 2018-8-15 15:57:02 | 显示全部楼层 |阅读模式
Wafer-scale fabrication of CMOS-compatible, high aspect ratio encapsulated nanochannels
圆片规模制造CMOS兼容的高纵横比封装纳米通道
Journal of Vacuum Science & Technology B 36, 051801 (2018);

https://doi.org/10.1116/1.5034463

Melissa Alyson Smitha), Isaac Weaverb), and Mordechai Rothschild
Hide Affiliations
Massachusetts Institute of Technology Lincoln Laboratory, 244 Wood St., Lexington, Massachusetts 02421
a)Electronic mail: melissa.smith@ll.mit.edu
b)Current address: Duke University, 311 Research Dr., Room 331, Durham, North Carolina 27710.

ABSTRACT
摘要

Nanochannels are key structures in nanofluidics for a variety of different applications. However, typical nanochannel fabrication methods are ill-suited for full integration with other microfabricated components or devices. Here, nanochannels with an aspect ratio (length to cross-sectional dimension) of greater than 400 000 were demonstrated—where the width (35–40 nm) and height (140–150 nm) of the channels are sufficiently small to elongate macromolecules—at channel lengths on the order of millimeters. These channels were fabricated with a CMOS-compatible toolset, allowing for the batch fabrication of a multitude of channels and with the further potential of full integration with solid-state electronic and photonic devices on the same wafer. Finally, the versatility of the nanochannel fabrication platform was demonstrated by loading the channels with six different liquids, and it was verified that the fluid flow dynamics for each liquid can be well estimated with Washburn's equation.

        纳米通道是纳米流体的关键结构,适用于各种不同的应用。然而,典型的纳米通道制造方法不适合与其他微制造的部件或装置完全集成。在本文中,展示了纵横比(长度与横截面尺寸)大于400 000的纳米通道 - 其中通道的宽度(35-40nm)和高度(140-150nm)对于伸长大分子是足够小的 - 通道长度为毫米量级。这些通道采用与CMOS-兼容的工具组件制造,允许批量制造多个通道,并具有与同一晶圆上的固态电子和光子器件完全集成的潜力。最后,通过用六种不同的液体加载通道来证明纳米通道制造平台的多功能性,并且验证了每种液体的流体流动力学可以用Washburn方程很好地加以估算。


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