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在低折射率含氟聚合物中制备长程表面等离子体激元波导生物传感器

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发表于 2018-6-29 11:10:00 | 显示全部楼层 |阅读模式
Fabrication of long range surface plasmon waveguide biosensors in a low-index fluoropolymer
在低折射率含氟聚合物中制备长程表面等离子体激元波导生物传感器
Journal of Vacuum Science & Technology B 36, 042601 (2018);

https://doi.org/10.1116/1.5027859

Pengshuai Ren
  Department of Electronics, Carleton University, 1125 Colonel By Drive, Ottawa, Ontario K1S 5B6, CanadaOleksiy Krupin
  School of Electrical Engineering and Computer Science, University of Ottawa, 800 King Edward Ave., Ottawa, Ontario K1N 6N5, Canada and Centre for Research in Photonics at the University of Ottawa, University of Ottawa, 25 Tempeton, Ottawa, Ontario K1N 6N5, CanadaPierre Berinia)
  School of Electrical Engineering and Computer Science, University of Ottawa, 800 King Edward Ave., Ottawa, Ontario K1N 6N5, Canada; Centre for Research in Photonics at the University of Ottawa, University of Ottawa, 25 Tempeton, Ottawa, Ontario K1N 6N5, Canada; and Department of Physics, University of Ottawa, 150 Louis Pasteur, Ottawa, Ontario K1N 6N5, CanadaR. Niall Tait
  Department of Electronics, Carleton University, 1125 Colonel By Drive, Ottawa, Ontario K1S 5B6, Canada
lessHide Affiliations
a)Author to whom correspondence should be addressed: electronic mail: berini@eecs.uottawa.ca

ABSTRACT
摘要

The authors report the fabrication of long-range surface plasmon polariton biosensors consisting of thin narrow Au stripes embedded in a low refractive index fluoropolymer with etched fluidic channels. The fabrication process incorporates a sacrificial SiO2 channel etch stop layer to avoid waveguide damage and prevent channel over-etching, and an Al etch mask to minimize thermal cracking of the fluoropolymer during channel etching. Process details are reported along with fabrication results, and the optical and biosensing performance of the fabricated devices are demonstrated. The biosensors were tested for bulk sensitivity and bovine serum albumin (BSA) protein adsorption producing notable changes for solutions with different refractive indices (increment of 2 × 10−3) and a change in insertion loss of 0.1 dB as a monolayer of BSA forms on the device.

        作者报道了制备长程表面等离子体极化激元生物传感器,该传感器由薄而窄的金条构成,后者嵌入在具有蚀刻流体通道的低折射率含氟聚合物中。该制备工艺包括一层牺牲SiO2沟道蚀刻停止层,以避免波导损伤并防止沟道过度蚀刻,还包括Al蚀刻掩模,使得沟道蚀刻期间含氟聚合物的热裂性最小化。对工艺细节作了报道,包括了制备结果,并展示了所制备的器件的光学和生物传感性能。测试了生物传感器的体积灵敏度和牛血清白蛋白(BSA)蛋白质吸附,对于具有不同折射率(增量2 × 10−3)的溶液产生显着变化,并且0.1dB的插入损失的改变,以单层BSA的形式在器件上形成。


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