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甲烷浓度对于金刚石膜二次形核的影响

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发表于 2018-5-3 16:56:33 | 显示全部楼层 |阅读模式
甲烷浓度对于金刚石膜二次形核的影响
王小安,汪建华,翁俊,黄平
武汉工程大学材料科学与工程学院湖北省等离子体化学与新材料重点实验室
INFLUENCE OF METHANE CONCENTRATION ON RENUCLEATION IN DIAMOND FILMS
WANG Xiao-an,WANG Jian-hua,WENG Jun,HUANG Ping
Provincial Key Laboratory of Plasma Chemistry and Advanced Materials,School of Materials Science and Engineering,Wuhan Institute of Technology

摘要 采用实验室研制的石英钟罩式MPCVD装置,在低功率(950 W)条件下,以H2-CH4为反应气源,在不同甲烷浓度下沉积了金刚石膜。利用扫描电子显微镜、激光拉曼光谱及X射线衍射仪等对金刚石膜二次形核现象进行了分析。实验结果表明:甲烷浓度变化对金刚石膜沉积过程中二次形核有不同程度的影响。甲烷浓度由1.0%上升到2.5%时,薄膜中二次形核现象逐渐增加,晶粒尺寸逐渐减小,金刚石相含量下降,晶面取向由(111)面转变为(220)面以及(311)面。

关键词 : 二次形核,  甲烷浓度,  微波等离子体,  金刚石膜   

Abstract:Polycrystalline diamond films were produced at different concentration of CH4 through bell-jar type microwave plasma chemical vapor deposition apparatus at low power,using H2-CH4 as source gas. The renucleation of diamond films was examined and analyzed by using scanning electron microscopy,X-ray diffraction and Raman spectroscopy. The results show that the methane concentration has a significant effect on the renucleation of diamond films. With the increase of the concentration ratio of methane(1.0%~2.5%),the renucleation ratio was increased,the grain sizes were decreased as well as the diamond phase. While the diamond film gradually tend from(111)to(220)and(311)faces growth.

Key words: renucleation           methane concentration           microwave plasma           diamond film

基金资助:国家自然科学基金(11175137)、湖北省教育厅项目(Q20151517)

作者简介: 王小安(1990-),男,湖北荆州人,硕士,主要从事等离子体应用研究。

引用本文: 王小安,汪建华,翁俊,黄平. 甲烷浓度对于金刚石膜二次形核的影响[J]. 真空与低温, 2016, 22(2): 114-118.       
WANG Xiao-an,WANG Jian-hua,WENG Jun,HUANG Ping. INFLUENCE OF METHANE CONCENTRATION ON RENUCLEATION IN DIAMOND FILMS. journal1, 2016, 22(2): 114-118.

文章来源:《真空与低温》杂志2016年22卷2期

刊出日期:2016-04-30

链接地址:http://www.lipcast.cn:81/zkydw/CN/abstract/abstract83.shtml


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