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导线在真空环境中的放气特性分析

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发表于 2018-5-3 14:45:30 | 显示全部楼层 |阅读模式
导线在真空环境中的放气特性分析
陈蕾,肖梅,张晓兵,杨玲玲,吴晓斌,王魁波,罗艳
1. 东南大学电子科学与工程学院显示中心,南京210096;
2. 中国科学院光电研究院,北京100000
THE OUTGASSING CHARACTERISTICS ANALYSIS OF THE WIRE IN THE VACUUM ENVIRONMENT
CHEN Lei,XIAO Mei,ZHANG Xiao-bing,YANG Ling-ling,WU Xiao-bin,WANG Kui-bo,LUO Yan
1. Display Centre,School of Electronic Science and Engineering,Southeast University,Nanjing 210096,China;
2. Academy of Opto-electronics,Chinese Academy of Sciences,Beijing 100000,China

摘要 材料放气特性对分析真空中残余气体成分有重要影响。主要研究常用导线绝缘层聚全氟乙丙烯和可溶性聚四氟乙烯这两种材料在真空环境中的放气特性。采用小孔流导法初步测量了样品在常温、加热以及冷却条件下的放气率,利用四极质谱计测量了样品在不同温度条件下的放气质谱图。结果表明这两种材料在加热过程中的放气率先增大后减小,并随着抽气不断减小,在加热过程中的谱图中检测到质量数为69 的气体,说明放出的气体成分含氟。

关键词 : 导线,  材料放气率,  小孔流导法,  四极质谱法   

Abstract:The outgassing characteristics of material is an important parameter for choosing materials in a vacuum system. In this paper,we will research the outgassing characteristics of two materials in a vacuum environment. We use the hole conductance method to measure outgassing rates of the samples at room temperature,baking temperature and after cooling conditions. At the same time,the quadrupole mass spectrometer is used to measure the mass spectrum of the samples at different conditions. The results show that the outgassing rate of the two materials will increase followed by decrease when they are baked,and decrease when pumped. Meanwhile,the mass number 69 is detected in the barking progress,which means that FEP and PFA can release gas containing fluoride.

Key words: wire           the outgassing rate of materials           orifice conductance method           the quadrupole mass spectrometer

作者简介: 陈蕾(1990-),女,江苏扬州人,硕士研究生,从事热解吸质谱法分析表面污染物研究。

引用本文: 陈蕾,肖梅,张晓兵,杨玲玲,吴晓斌,王魁波,罗艳. 导线在真空环境中的放气特性分析[J]. 真空与低温, 2016, 22(2): 100-103.       
CHEN Lei,XIAO Mei,ZHANG Xiao-bing,YANG Ling-ling,WU Xiao-bin,WANG Kui-bo,LUO Yan. THE OUTGASSING CHARACTERISTICS ANALYSIS OF THE WIRE IN THE VACUUM ENVIRONMENT. journal1, 2016, 22(2): 100-103.

文章来源:《真空与低温》杂志2016年22卷2期

刊出日期:2016-04-30

链接地址:http://www.lipcast.cn:81/zkydw/CN/abstract/abstract80.shtml


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